Extreme ultraviolet lithography - PDFSEARCH.IO - Document Search Engine

Extreme ultraviolet lithography
Results: 188

#	Item
151	2008 International Workshop on EUV Lithography Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2013-11-17 22:17:14 Radiation Plasma physics Extreme ultraviolet X-ray astronomy National Concert Hall X-ray Electromagnetic radiation Medicine Extreme ultraviolet lithography
152	Source Workshop Presents Data on Readiness of 50 W EUV Sources to Support EUVL Scanners Vivek Bakshi, EUV Litho, Inc. The 2013 Source Workshop (Nov 3-7, 2013, Dublin, Ireland) brought together one of the world’s larges Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2013-11-24 17:30:05 Extreme ultraviolet Laser Ultraviolet Electromagnetic radiation Extreme ultraviolet lithography Radiation
153	Ultraviolet Imaging Spectrograph (UVIS) Model[removed]) Add to Reading List Source URL: lasp.colorado.edu Language: English - Date: 2004-08-04 13:54:41 Ultraviolet Histone deacetylase Extreme ultraviolet Electromagnetic radiation Extreme ultraviolet lithography High Speed Photometer
154	Benchmarking EUV mask inspection beyond 0.25 NA Kenneth A. Goldberg1, Iacopo Mochi1, Patrick P. Naulleau1, Hakseung Han2, Sungmin Huh3 1 Add to Reading List Source URL: goldberg.lbl.gov Language: English - Date: 2009-01-09 19:20:00 Atomic molecular and optical physics Physics Extreme ultraviolet lithography Photomask Optical aberration Defocus aberration Camera lens Ultraviolet Astigmatism Geometrical optics Electromagnetic radiation Optics
155	SPIE_OP_2005lpreprint.indd Add to Reading List Source URL: goldberg.lbl.gov Language: English - Date: 2005-08-27 13:56:52 Wave mechanics Waves Observational astronomy Extreme ultraviolet lithography Optical coating Interferometry Angular resolution Extreme ultraviolet Optical aberration Optics Physics Electromagnetic radiation
156	Advanced X-ray Optics Metrology for Nanofocusing and Coherence Preservation w hat is the point of developing new highbrightness light sources if beamlii optics Add to Reading List Source URL: goldberg.lbl.gov Language: English - Date: 2008-05-23 16:37:06 Particle physics Stanford University United States Department of Energy National Laboratories Extreme ultraviolet lithography Beamline SLAC National Accelerator Laboratory Advanced Light Source Synchrotron Wavefront Physics Optics Particle accelerators
157	Sub-10nm HP Patterning using EUV based Self-Aligned Double Patterning (P46) Sushil Padiyar Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2013-07-08 00:26:40 Sizing Multiple patterning Extreme ultraviolet lithography Extreme ultraviolet
158	P42 New approach for reducing the Out of Band effect and Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2013-07-08 00:25:58 Outgassing Resist Ultraviolet Nissan Motors Electromagnetic radiation Extreme ultraviolet lithography Extreme ultraviolet
159 $Extreme ultraviolet lithography / Photomask / Ultraviolet / Reflectivity / Extreme ultraviolet / 100 nanometres / Refractive index / Color / Electromagnetic radiation / Physics / Optics$	Mask aspects of EUVL imaging at 27nm node and below Natalia Davydovaa,, Eelco van Settena, Sang-In Hand, Mark van de Kerkhof , Robert de Kruifa, Dorothe Oorschota, John Zimmermane, Ad Lammersa, Brid Add to Reading List Source URL: brion.com Language: English* - Date: 2013-04-19 19:56:51 Extreme ultraviolet lithography Photomask Ultraviolet Reflectivity Extreme ultraviolet 100 nanometres Refractive index Color Electromagnetic radiation Physics Optics
160	Microsoft PowerPoint - Semicon TWINSCAN NXT1970Ci final (handout version).pptx Add to Reading List Source URL: www.semicontaiwan.org Language: English - Date: 2013-09-12 01:42:40 Wafer Extreme ultraviolet lithography Semiconductor device fabrication Immersion lithography Multiple patterning

UPDATE